島津評論 69〔3・4〕 233～241 (2013.3)
The spheroid energy analyzers (SEA) are a new class of charged particle energy analyzers that are characterized with very high energy resolution and transmission. The design of the first prototype analyzer is described. A novel geometrical framework is presented, that describes SEA analyzers in general terms within which the well known types of analyzers CMA and CHA appear to be only particular examples. A very high order of focusing of these analyzers is presented via simulation that indicates the existence of 13th order focusing in one of our models. Experimental results are presented showing relative energy resolution of 0.05％ of the pass energy at a transmission of 21％ out of a 2π steradian.
Keywords : Electron optics, Energy analyzer, Order of focusing, Auger electron spectroscopy, Photoelectron spectroscopy
1Shimadzu Research Laboratory (Europe) Ltd, Manchester, UK
2Institute for Analytical Instrumentation, Russian Academy of Sciences, St. Petersburg, Russia
3Technology Research Laboratory, Shimadzu Corporation, Kyoto, Japan